The Korea Research Institute of Standards and Science (KRISS) has successfully developed a system that diagnoses the lifetime of parts used in the semiconductor plasma processes in real time. It is expected that the new system can help preemptively prevent contaminant particles generated by corrosion of components, thereby upgrading the semiconductor yield as well as the stability and cost efficiency of the process. The work is published in the Journal of the European Ceramic Society.
Lifetime of semiconductor processing equipment parts can be checked in real time
